Product Name: Hexamethyldisilazane

Synonyms: ((CH3)3Si)2NH;1,1,1,3,3,3-hexamethyl-disilazan;1,1,1-trimethyl-n-(trimethylsilyl)-silanamin;Disilazane, 1,1,1,3,3,3-hexamethyl-;BIS(TRIMETHYLSILYL)AMINE;HMDS;hexamethyl disilizane;HEXAMETHYLDISILYLAMINE

CAS: 999-97-3

MF: C6H19NSi2

MW: 161.39

EINECS: 213-668-5

Product Categories: organosilicon compound;Chemical Synthesis;Organometallic Reagents;Organosilicon;Materials for Surface Modification;Substrates and Electrode Materials;Electronic Chemicals;Materials Science;Micro/NanoElectronics;Organic and Printed Electronics;Semiconductor Grade Chemicals;Pharmaceutical Intermediates;Organics;Analytical Chemistry;Biochemistry;GC Derivatizing Reagents;Nucleosides, Nucleotides & Related Reagents;Protecting Agents for Hydroxyl and Amino Groups;Protecting Agents, Phosphorylating Agents & Condensing Agents;Si (Classes of Silicon Compounds);Silazanes;Silicon Compounds (for Synthesis);Silylation (GC Derivatizing Reagents);Si-N Compounds;Synthetic Organic Chemistry;Trimethylsilylation (GC Derivatizing Reagents);Blocking Agents;Protective Agents;Silylating Agents;API Intermediate

Mol File: 999-97-3.mol

Hexamethyldisilazane Structure

Hexamethyldisilazane Chemical Properties

Melting point -78 °C

Boiling point 125 °C(lit.)

density 0.774 g/mL at 25 °C(lit.)

vapor density 4.6 (vs air)

vapor pressure 20 hPa (20 °C)

refractive index n20/D 1.407(lit.)

Fp 57.2 °F

storage temp. 2-8°C

solubility Miscible with acetone, benzene, ethyl ether, heptane and perchloroethylene.

form Liquid

pka 30(at 25℃)

color Colorless

Specific Gravity 0.774

Odor Ammonia odour

PH Range 8.5

explosive limit 0.8-25.9%(V)

Water Solubility REACTS

Hydrolytic Sensitivity 7: reacts slowly with moisture/water

Sensitive Moisture Sensitive

Merck 14,4689

BRN 635752

InChIKey FFUAGWLWBBFQJT-UHFFFAOYSA-N

CAS DataBase Reference 999-97-3(CAS DataBase Reference)

NIST Chemistry Reference Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-(999-97-3)

EPA Substance Registry System Hexamethyldisilazane (999-97-3)

Safety Information

Hazard Codes F,C,Xn

Risk Statements 11-20/21/22-34-52/53

Safety Statements 16-26-36/37/39-45-61

RIDADR UN 3286 3/PG 2

WGK Germany 2

RTECS JM9230000

F 21

Autoignition Temperature 325 °C

Hazard Note Flammable

TSCA Yes

HS Code 2931 90 00

HazardClass 3

PackingGroup II